You’re not taking the resist mask into account, or multiple passes. https://en.m.wikipedia.org/wiki/Multiple_patterning https://en.m.wikipedia.org/wiki/Multiple

You’re not taking the resist mask into account, or multiple passes. https://en.m.wikipedia.org/wiki/Multiple_patterning https://en.m.wikipedia.org/wiki/Multiple_patterning Not sure how to ELI5 it though...