3 ms·
They do something like this with sidewall patterning: https://en.wikipedia.org/wiki/Spacer_patterning https://en.wikipedia.org/wiki/Spacer_patterning
by josaka 9y ago
They do something like this with sidewall patterning: https://en.wikipedia.org/wiki/Spacer_patterning https://en.wikipedia.org/wiki/Spacer_patterning