4 ms·
Could a subtractive mechanism work? For example, if you want to create a 5nm bump, but you only have a 20nm thick tool to draw bumps, you could draw "everything
by anonytrary 9y ago
Could a subtractive mechanism work? For example, if you want to create a 5nm bump, but you only have a 20nm thick tool to draw bumps, you could draw "everything except the 5nm bump".
In other words, draw a 20nm thick annulus around a 5nm center, thereby having achieved the desired result: drawing a 5nm object with a 20nm tool.
That's a toy example, idk quite how that would translate to photolithography.
- josaka 9y agoThey do something like this with sidewall patterning: https://en.wikipedia.org/wiki/Spacer_patterning https://en.wikipedia.org/wiki/Spacer_patterning
- dogma1138 9y agoIt’s not a one off etch it’s a series of etchings and depositions of material over the surface until you get the final product.