2 ms·
Depending on the layout complexity, mask write times for EUV masks can take many days with a single beam mask writing tool. Considering that even with EUV dozen
by Nanite 9y ago
Depending on the layout complexity, mask write times for EUV masks can take many days with a single beam mask writing tool. Considering that even with EUV dozens of masks are needed for a mask set for a 7nm product, this would result in a few months of total processing time, of course multiple mask writers are typically used in manufacturing sets. The time issue can be mitigated but not at unlimited cost.