From [2]: To put it simply: in order to generate 13.5 nm EUV light in a special plasma chamber, you need a very powerful laser (because a significant amount of

From [2]: To put it simply: in order to generate 13.5 nm EUV light in a special plasma chamber, you need a very powerful laser (because a significant amount of its power will be wasted); a generator and a catcher for tin droplets (in addition to a debris collector); as well as a special, nearly perfect, elliptical mirror. To make everything even trickier, since EUV light with 13.5 nm wavelength can be absorbed by almost any matter, EUV lithography has to be done in vacuum. This also means that traditional lenses cannot be used with EUV because they absorb 13.5 nm light; instead, specialized multilayer mirrors are used. Even such mirrors absorb about 30% of the light, which is why powerful light sources are needed. This level of absorption can lead to ablative effects on the mirrors themselves, which introduces additional engineering challenges. To learn more how EUV LPP light sources work, check out this video. https://youtu.be/8xJEs3a-1QU https://youtu.be/8xJEs3a-1QU