Masks may be a pain, but the pellicle (the part that protects the masks from contamination) is non-existent unless they've made a breakthrough I'm unaware of:

Masks may be a pain, but the pellicle (the part that protects the masks from contamination) is non-existent unless they've made a breakthrough I'm unaware of: https://www.semiwiki.com/forum/content/3720-euv-pellicles.html https://www.semiwiki.com/forum/content/3720-euv-pellicles.ht... basically this means any dust or contamination of the mask by anything bigger than 50-80 nm will possibly ruin the maskset and destroy the yield until it is replaced. It's a huge challenge.