Actually, x-ray lithography was a competing technology to EUV for a long time, but it has its own problems, not the least of which is going through the wafer it

Actually, x-ray lithography was a competing technology to EUV for a long time, but it has its own problems, not the least of which is going through the wafer itself and the fact that optics are ridiculously hard to make for it. Masks are already really hard to write and are projected to explode in price (not that they haven't already). Don't crush chip startups under mask costs ;)