3 ms·
Interesting, I wonder if the reticle limit is smaller on EUV litho machines, that would explain their smaller maximum die size compared to 193i immersion steppe
by deepnotderp 9y ago
Interesting, I wonder if the reticle limit is smaller on EUV litho machines, that would explain their smaller maximum die size compared to 193i immersion steppers.
- sliverstorm 9y agoNot knowing for sure, I'd wonder if it's limited by EUV power output. The main challenge has always been, how to produce enough light. Whereas with regular litho, your reticle limit is a function of how expensive the lens is.
- deepnotderp 9y agoDefinitely, I think this is the issue. You're definitely right that the problem with EUV is how to get a strong enough power source.