4 ms·
Actually most nodes are phasing out EUV lithography research and moving to plasma-enhanced lithography. Pretty sure you can't really go below 15nm without PECVD
by cbryn 9y ago
Actually most nodes are phasing out EUV lithography research and moving to plasma-enhanced lithography. Pretty sure you can't really go below 15nm without PECVD/Plasma enhanced etch steps.