From the Ars article a couple of days ago [1], it sounds like EUV improvements are actually at the core of the work announced here. [1] https://arstechnica.co.

From the Ars article a couple of days ago [1], it sounds like EUV improvements are actually at the core of the work announced here. [1] https://arstechnica.co.uk/gadgets/2017/06/ibm-5nm-chip/ https://arstechnica.co.uk/gadgets/2017/06/ibm-5nm-chip/