> You can actually use X-ray litho Wouldn't that result in a threshold shift? (X-rays are well beyond Si02 bandgap, so you'd get electron-hole pairs in the ox

> You can actually use X-ray litho Wouldn't that result in a threshold shift? (X-rays are well beyond Si02 bandgap, so you'd get electron-hole pairs in the oxide. The electrons are fairly mobile, but the holes get trapped iirc.)