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I'd think space would be, relatively, filthy for lithography. Maybe depends where.
by madengr 10y ago
I'd think space would be, relatively, filthy for lithography. Maybe depends where.
- eliasbagley 10y agoMore filthy than earth, though?
- madengr 10y agoMaybe, compared to a semiconductor fab vacuum chamber, especially as extreme UV is ramping up. Charged particles to deal with in space too.