I can't speak to MBE, but for CVD I mostly just googled around and read any papers I could find. However, IIT Madras has an entire course on the subject, all o

I can't speak to MBE, but for CVD I mostly just googled around and read any papers I could find. However, IIT Madras has an entire course on the subject, all of which are on youtube: https://www.youtube.com/watch?v=fsDO7gUBYjg https://www.youtube.com/watch?v=fsDO7gUBYjg I've been learning a lot from that, though it's focused on laying down semiconductor layers; most of the info on CVD diamonds seems to be locked away in proprietary processes for various manufacturers. I foresee a lot of failed experiments in my future!