> "Additionally electron beam optics are magnets, so driving multiple beams in the same space would be complex." Could you not use a Halbach array? https://en

> "Additionally electron beam optics are magnets, so driving multiple beams in the same space would be complex." Could you not use a Halbach array? https://en.m.wikipedia.org/wiki/Halbach_array https://en.m.wikipedia.org/wiki/Halbach_array Furthermore, I had in mind that you'd have synchronisation between the beams. Consider the use case of one e-beam per chip. As each wafer has multiple chips you would still have plenty of room for parallel beams working at any one time. As for cost, do you have a ballpark figure for how much the devices cost?