There has been recent advantages in multi-column E-beam that might fix some of the throughput issues. I mostly see it used on the quality control side for SEM i

There has been recent advantages in multi-column E-beam that might fix some of the throughput issues. I mostly see it used on the quality control side for SEM imaging faster, but in a decade or too it might make its way into production. http://spie.org/newsroom/4609-multiple-electron-beam-direct-write-comes-of-age http://spie.org/newsroom/4609-multiple-electron-beam-direct-...