3 ms·

"Extreme Ultraviolet Lithography..." Because saying "We're using x-rays" just sounds too scary right now...

• mikeyouse 10y ago
  I doubt that has anything to do with it.. Probably due to the 15nm wavelength they're using and a <10nm wavelength being the typical cutoff for x-ray.
• e2e8 10y ago
  https://en.wikipedia.org/wiki/Extreme_ultraviolet https://en.wikipedia.org/wiki/Extreme_ultraviolet