Its more of a combo of things at this point rather than specifically photolithography or unwanted quantum behavior that is slowing Moore's Law. The currently u

Its more of a combo of things at this point rather than specifically photolithography or unwanted quantum behavior that is slowing Moore's Law. The currently used light wavelength is many times larger than the features they make with it, and the lamps for the next smaller wavelength have serious issues of not being bright enough as they are ~80w now and need to be ~200w, being blocked by air but they cant run in a vacuum because immersion lithography and other parts of the process don't work in vacuum and finally they are only reliable enough for lab use. In other places they are running out of atoms to take away (eg: some parts are 15 atoms thick and at 14 atoms thick they no longer have the properties needed). In some cases they are stretching atoms farther apart to make them work better with the few they have (see strained silicon). Another part is heat rejection from the silicon as while each transistor is more efficient and smaller on a individual basis, you have much more of them. This is why modern processors, when running a single thread workload, will shut off a core to spend its heat budget on running that 1 core faster or a big difference between a phone and tablet CPU is the amount of power dissipation rather than the silicon itself.