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Indeed, instead or lenses the EUV machines use mirrors. The vacuum makes things more difficult as well, you can't cool much to the air. I think they finally m
by ragebol 11y ago
Indeed, instead or lenses the EUV machines use mirrors.
The vacuum makes things more difficult as well, you can't cool much to the air.
I think they finally managed the tin contamination, especially the first mirror or so was a big issue.
Source: some friends working at ASML. It's a big employer in its region, Eindhoven, Netherlands.