It's a tricky thing, and I fully admit that I have a limited understanding of the specific effects of x-rays on semiconductor devices. My understanding though i

It's a tricky thing, and I fully admit that I have a limited understanding of the specific effects of x-rays on semiconductor devices. My understanding though is that you get higher resolution with higher-energy x-rays, and that as you increase the energy, you're more and more likely to damage the semiconductor (e.g. by inducing bit flips). Here's some material from a flash memory manufacturer with more details: https://www.spansion.com/Support/Application%20Notes/X-ray_inspection_on_flash_AN.pdf https://www.spansion.com/Support/Application%20Notes/X-ray_i...